报告题目：MEMS and NEMS at the University Furtwangen (Black Forest, Germany)

报告人：Prof. Dr. Ulrich Mescheder，Executive Vice president for Research of the HFU (Hochschule Furtwangen University)

时间：1月22日星期五下午2：30

地点：5号楼14楼会议室

Description:

An overview will be given about the different MEMS and NEMS projects. Different developments of Si-based MEMS and NEMS devices are presented.

Especially a self organized Nanostructuring process and various applications of the derived nanostructured Silicon will be shown.

 

Curriculum Vitae

　  Graduated with Dipl. Phys. at the University of Marburg, Germany, in 1982 after study at University Bielefeld and Marburg (focus on solid state physics). Dr. rer. nat. (Ph.D.) from University Marburg in 1985, work on „Optoelectrical Measurements of amorphous Silicon“.

From1985-1991 with the Philips Research Laboratory, Hamburg, Department Material Science, Thin film technology. Visiting scientist at the Institute for Microstructuring Technology (IMT) in Berlin, working on technological developments for x-ray-lithography (mask technology and characterisation techniques).

Since 1991 professor at HFU, the former Fachhochschule Furtwangen (FHF), University of Applied Sciences. From 1996 director of Institute for Applied Research of the HFU,. Since 1998 head of theMicroelectronic-laboratory at the HFU. Since 2006 Executive Vice-president of the HFU Recent research activities on microssystem technology, especially miniaturized sensors and high precision actuation, porous Silicon, MOEMS.

 Author and co-author of about 70 publications in international journals and conference proceedings, author of a textbook „Mikrosysteme, Konzepte und Anwendungen“ (Microsystems, concepts and applicatons, published in the Teubner Verlag, Germany).